S3A-DVK
S3A-DVK
S3A-DVK
這里把系統(tǒng)功能分成兩部分：現(xiàn)場級控制、監(jiān)控級控制。現(xiàn)場級控制完成2.1所述的功能1），其余功能由監(jiān)控級完成。控制系統(tǒng)的網(wǎng)絡(luò)拓撲結(jié)構(gòu)如下圖二：
現(xiàn)場級的控制必須是可靠、實時的。在現(xiàn)場級的控制器中，PLC以其優(yōu)良的性能、多樣的可選系列和較好的性能價格比，在當今控制領(lǐng)域占了主導地位。所以，在本系統(tǒng)中現(xiàn)場級控制器選用PLC.
監(jiān)控級的任務(wù)由工控機通過組態(tài)軟件來實現(xiàn)。遠程監(jiān)控任務(wù)由工控機實現(xiàn)，這樣可以建立友好的人機界面，便于操作。使用組態(tài)軟件能方便的進行系統(tǒng)變量的組態(tài)，易于開發(fā)人機界面，縮短項目的開發(fā)周期。
3．系統(tǒng)的功能實現(xiàn)
3．1 現(xiàn)場級控制功能的實現(xiàn)
現(xiàn)場控制器選用GE公司的90-30系列PLC，同時它也為上位機提供現(xiàn)場的數(shù)據(jù)信息。通過以太網(wǎng)模塊支持以太網(wǎng)通信，同時也支持RS232和RS485；具有浮點運算協(xié)處理器，能進行浮點運算；內(nèi)置PID功能模塊。
所有回路采用PID控制。其中，液化冷凍工段為三個串級控制，用神經(jīng)網(wǎng)絡(luò)進行在線辨識，動態(tài)整定控制參數(shù)。
3．2 監(jiān)控級控制功能的實現(xiàn)
在總控制臺，有兩臺互相備份的工控機，通過以太網(wǎng)對整個生產(chǎn)線進行實時監(jiān)控。
Applied Materials 0020-04277 Flange
Applied Materials Cover 0200-40112-B
Applied Ceramics RING, QUARTZ SHADOW MXP, 0200-10176
Fine Series Stainless Steel Valve KC-FUB-71-19.05?-CJN
FURON 3 WAY VALVE 3/8 FLR ULTRA PURE Model UPM3-686
Entegris 1" PFA Hand Valve, KC-HFM-16F
Allen-Bradley Feed Through Interface Module KC-1492-IFM
APPLIED CERAMICS COLLAR, 200MM WIDER, 91-01765A
APPLIED MATERIALS PLATEN 5" OD, 01-82622-00
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Shumacher I/O Controller Board 1730-3009
Leitz Wetzlar PL Fluotar 20x/0.45 567012
Leica ∞/- PL Fluotar optics 10x/0.25 567010
WATLOW Heater Imersion 5KW, 220v, Z6643
KLA Instruments 81B Assembly 710-659465-20
LAM, Coupling Leveling Ring, 853-210621-308
BALDOR Assy PUMP Motor W/viton 34H609W315G1
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PALL Fairy Ring Filter KC-GDF6406E
WARRENDER PVDF WET END, WE5002/ICS
MKS MANOMETER, TYPE 128, 128AA-00010B
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FRABA ABSOLUTE ANGLE ENCODER 5813-4096-FBA1D?P03PG
Eurotherm AC Servo Motor, PGH07
BIORAD 8" Cassette, QS600, 013-5363-3
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EUROTHERM AMPSTACK, 70 AMP, 208 AC, AS-1
TIMNTA INPUT FILTER 3L+N+E, FMAD-0937-8010
EUROTHERM CONTROLLER, 461082
NT INTERNATIONAL FLOW THRU PRESSURE TRANSDUCER
Futurestar FLOWMETER 5 GPM 1/2" Anolog Odyssey
Master Interface PCB w/optional Arcom 123626
Lambda LND X 152 12-15 Volt Regulated Power Supply 2.5A
APPLIED MATERIALS QUARTZ COVER 125mm POLY, 0200-10044
APPLIED MATERIALS Ring, top, 125 mm flat, 0200-00157
COORS Tek, SEMI WAFER. CEL 8.62, 41120-87756-010
Entegris Replacement element kit and wire guards 213-75
Entegris 3/4" PFA Hand Valve KC-201-41-01
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AMD Liquid Conductivity Assy. FT811-05-001 Rev. A
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Applied Materials 0020-86734 CLAMP, FILAMENT L/H
Applied Materials 0020-86733 CLAMP, FILAMENT R/H
Applied Materials 0020-31147
KLA Instruments KLA R1F Assembly 710-652840-20 Rev E1
Absolute Filter Assembly 2T-39516093-Z28?5
Absolute Filter Assembly 2T-69516093-Z28?4
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TESTO MODEL 490 CALIBRATOR
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LEYBOLD TR ANGLE VALVE, WITH ACTUATOR, 29823
LEYBOLD INLINE VALVE, VIP-025
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BALLUFF LINEAR TRANSDUCER 305MM, BTL-S-P1-M0305-?P-KA05
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EMOTEQ BRUSHLESS DC SERVO MOTOR HS01001-A02-HGE
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KOBOLD INSTRUMENTS FLOWMETER, SV-10
CTE CHEM TEC / SEMITOOL ANALOG FLOWMETER,
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Semitool / Hathaway Motor Encoder W/Brake
APPLIED MATERIALS INC. LINER, SIDE, P19500 AMI
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NET MERCURY VALVE, PNEUMATIC ACTUATED- GAS
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Sensor Technics Pressure Transducer 839-607828/SQ00?503
AP Tech Regulator AP1910SM/889-60?6950
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Proportion Air PA 70905-27
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Applied Materials 0020-82821
Applied Materials 0020-83583 SHIELD GUIDE TUBE 9500XR
SENSARRAY 6" TEST WAFER PART 1501B-6-0001
MAGNETEK LOADER, 10-349222-01
Futurestar Rotameter-Flowm?eter
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DNS ELECTRONICS ARM, 1H (2) - 80A- SCRUBBER
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Tescom Pressure Regulator 44-2262-242-010
LFE INSTRUMENTS TEMPERATURE CONTROLLER 955241C-1190
Flextech, Cabinet Controller, 2103-0391
EUROTHERM DRIVE, B5261101BZ
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Saint Gobain Door Seal 480150091
AP2 Solenoid Bank 16V VV3Q11-ULB97019?3-16
Air Products Solenoid Digi. output board 809-607699
NT INTERNATIONAL ACID TRANSDUCER 1/2 FLR 0-60PSI
NT INTERNATIONAL PRESSURE TRANSDUCER FLOW THRU 3/4"
SMC APX16-Point Solenoid Bank 13V VV3Q11-ULB97019?4-13
SMC APX16-Point Solenoid Bank 10V VV3Q11-ULB97019?4-10
Granville-Phill?ips 275 Convectron Gauge For N2
MRC PCB, STEPCONTI/F, 884-55-000
Cable, Sensor, PT-100 85939
Saint Gobain Door Seal 480150089
Nikon PCB 4S018-210A
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Blue White Flowmeter, 0.2-2.0 gpm, Model F-500
Futurestar Odyssey Flowmeter 1 pm, 1/4 FLR
Futurestar Odyssey Flowmeter 1.75-5 lpm, 3/8 FLR
Futurestar Odyssey Flowmeter 5-250cc, 1/4 FLR
Yaskawa AC Servo Motor, Brushless with Brake
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EMOTEQ CORP MOTOR ASSY PADDLE ACTUATING HS01001-A02-HGE
PATLITE SIGNAL TOWER, SL-402V
APPLIED CERAMICS, CERAMIC PLATE, 200MM, 716-028721-281
Cherry Electric exhaust vane switch 1491-3144
ASYS CONTROLLER, 10052885
FURON 1/2", 2 way Valve, DIBPOL8PC
FURON OMNISEAL 3/16" X 12.375" 70887-23
INSERT, INNER, MULTI-CHARGER/B?EAM TRAP MULTI-CHARGED
HATHAWAY/EMOTEQ MOTOR LIFT/TILT, BH02301A F04HBE
Micronix, I/0 board, PV-1648 Rev.3
Arcom, I/0 board, AIM104-ANALOG-I?/O
Air Products Comm. Controller board 287-607240
WESCO DISCONNECT SWITCH, NZM7-200-NA
Yaskawa AC Servo Motor, SGMP-01U314M
BIORAD 5" Cassette, QS600, 013-5363-1
APPLIED MATERIALS FINGER LONG HOLLOW GRIPPER -AMI (SLO
FURON 1/2", 2 way Valve, WB-2W8P-C
LEYBOLD STRAIGHT THRU VALVE, 428902
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AP200 Shuttle adaptor kit, AP20-K-250
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APPLIED MATERIALS ARC CHAMBER P19500
LAM RING, CLAMP-UPPER ELECTRODE
Trebor Model 85 Surge Suppressor
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APPLIED MATERIALS INC. VANE, (MRS)P19500 AMI
Speedfam Load Cup
Lambda Power Supply, 500W, 24 VDC, FE050024RA
Applied Materials Gas Distribution Plate
DNS ELECTRONICS ARM, IH (2)- 80A SCRUBBER
OMRON CAPACITIVE PROXIMITY SWITCH, E2K-C25MF1
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SMC VALVE SHUTTLE CAM PUMP F25 KT-PA2-38
Semitool OPTICAL BOARD ASSEMBLY 16730-01
APPLIED MATERIALS INC. HOLDER (MRS) P19500
Akrion Steag Valve PVDF610/15/D 7205A1 410200
APPLIED MATERIALS COVERING PIPE, 0020-0930
DNA CERAMIC IH ARM L=110MM 2-F3-31399
DAIFUKU MOTOR, CONV. ORIEN. TRAVEL BODY
Watlow Din-A-Mite DB2C-2060-C050
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Lambda Power Supply SC150U03
Lee ATMI Micropump LPVX0505600CA
Applied Materials 0020-81482
Applied Materials 0020-82822
TRIPP LITE UPS System SMARTINT700
ATMOS Air Handling Filter 2FM-22
Clean Room Products Air Handling Filter U3030A00ADACACA
Parker Motor MPC 1140X
Harowe Resolver 31BRCX-500-B1
Pacific Scientific Motor R63FSSA-HS-SS-N?V-04
POLYPURE BATH
SENSOR, SOG FLOW 3x2 N.C. ST215A
DYTEC VALVE, DUMP RINSER, QDV-400-PVDF-V
SMART UPS 1000VA BATTERY BACKUP
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DWYER PHOTOHELIC GUAGE, KC-3003MR
APPLIED MATERIALS SHOWER HEAD,5B PUTTER ETCH 0020-09933
MIKRO ELEKTRONIK M34, M-Module, 04M034-00
BALZERS ROLLE COUPLING, BB180942-T
EIT SENSOR STIK, 0-25 PPM, SERIES 4500
DELCO BATTERY BACK-UP, RST31
Circuit Board DAMPER CD BG4-8615
Circuit Board M-POS (CONVERTER) BG8-3326 BH8-1970-01
Circuit Board CDIF BG4-6631 BH8-1823 BG8-2676
DAIFUKU CO. LTD. BOARD (TFE) DAIFUKU P.C.-3419B
EARTH LEAKAGE BREAKER ASSEMBLY #5,
Circuit Board LIBRARY CONTROL PCB BG4-8193
HRD SENSOR PCB BG4-6583
CIRCUIT BOARD VEDZ-177 COMBX
JENCONS VAC SEAL
VARIAN TYPE 572 IONIZATION GAUGE, K7360301
Applied Materials 0020-04076
LAM ENCODER ASSEMBLY, MOTOR STEPPER ARM DRIVE
EDWARDS SERIES 1 EXHAUST MODULE
VARIAN ANGLE VALVE, L6281-301
VARIAN ANGLE VALVE, L6281303
Tripp-Lite Power Supply System OMINSMART 700
Applied Materials 0020-25662 SHIELD, CLAMP, SCRWLES- CO
Humphrey Solenoid Bank ST022601CJ-01
3 way/port
LAM PC Assembly 28-8875-012
APPLIED MATERIALS INSERT PINS, SILICON,125 MM,0200-3671
Pepperl+Fuchs Dual Discrete Signal Isolator Switch EX2
LEYBOLD POWER SUPPLY, 100/250
Ontrak Extender Arm Bracket 13-8800-047-02
Swagelok Bellows valve NC ACTUATOR SS-8BK-VCR SS-6BK-1C
Dwyer CFH Flow meter 300PSIG Max
SWAGELOK VALVE 2 WAY 1/4 VCR SS-43GVCR4-1466
Futurestar Fiberoptic Sensor Flowmeter 400-003-80
CONTEMPORARY CONTROLS STANDARD NETWORK CARD SB871660-10
VALVE, AIR OPERATED RK-AOV
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METRON TECHNOLOGY, THERM-X RODS 0641-0767-02 TYPE R
USHIO SUPER HIGH PRESSURE MERCURY LAMP USH-350DP
ZIEHL-ABEGG ELECTRONIC SPEED CONTROLLER, PAE10E-M
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DAIFUKU BOARD (MCP) DAIFUKU P.C.
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SUNX Wafer Sensor M-826
LAM SERVO MOTOR, 853-013720-608
Baldor 2 HP Motor VM555
Flanders Air Handling Filter
Flanders Air Handling Filter
LAM ASSY, VACUUM SWITCH, 100 TORR 853-017480-002
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