BROOKS 5850E進(jìn)口氣體質(zhì)量流量計銷售 一年質(zhì)保 認(rèn)證報告提供
5850E Standard Ranges 3 sccm to 30 slpm* (Nitrogen equivalent) *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) standard: 0°C and 101.3 kPa (760 Torr). Accuracy ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm. Repeatability 0.25% of rate Response Time Less than 3 seconds response to within 2% of full scale final value with a 0 to 100% command step. Power Requirements (NC Valve) +15 Vdc ±5%, 35 mA -15 Vdc ±5%, 180 mA 3.5 watts power consumption Power Requirements (NO Valve) +15 Vdc ±5%, 215 mA -15 Vdc ±5%, 180 mA 11.85 watts power consumption
BROOKS 5850E進(jìn)口氣體質(zhì)量流量計銷售 一年質(zhì)保 認(rèn)證報告提供 如有需要請聯(lián)系客思特設(shè)備（丹東）有限公司孫曉娜